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- | Layout Data: GDS-II Format |
- | MASK Data: MEBES Format |
- | CAD Information for GDS-II Data from Customers |
- | Tooling Information for E-Beam Data from MagnaChip |
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Data Conversion (Mask Pattern Generation) (GDS-II Format into MEBES Format) |
- | Mask Spec |
- | Mask Type: 2X,4X,5X(6inch) / Binary & PSM |
- | Frame Pattern, Test Module, etc. |
- | Due Date |